JPS63147816U - - Google Patents
Info
- Publication number
- JPS63147816U JPS63147816U JP3950187U JP3950187U JPS63147816U JP S63147816 U JPS63147816 U JP S63147816U JP 3950187 U JP3950187 U JP 3950187U JP 3950187 U JP3950187 U JP 3950187U JP S63147816 U JPS63147816 U JP S63147816U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- etching
- etching chamber
- magnetic field
- field pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3950187U JPS63147816U (en]) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3950187U JPS63147816U (en]) | 1987-03-18 | 1987-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63147816U true JPS63147816U (en]) | 1988-09-29 |
Family
ID=30852726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3950187U Pending JPS63147816U (en]) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63147816U (en]) |
-
1987
- 1987-03-18 JP JP3950187U patent/JPS63147816U/ja active Pending